Firma:                Philips

Modell:              XL 30 SFEG

Kommentar:      Dokumente engl.

FEI XL30-SFEG

High-resolution Scanning Electron Microscope

The XL30-SFEG is a high-resolution scanning electron microscope capable of resolutions better than 2 nm, magnifications over 600 kX, and operating voltages from 200 volts up to 30 kV with 1 kV and 2 kV being routine. At the lower beam potentials one can obtain excellent topographic detail and minimum charging while at the higher potentials one can get the optimum resolution and perform efficient EDS analyses. It also offers three imaging modes, each of which can be used simultaneously and blended to provide the desired image. This instrument is also fully computer controlled, making this a very easy to use system.

This instrument includes an EDAX Phoenix EDS system and a TexSEM Laboratories EBSD system. The EDS (energy dispersive xray spectroscopy) system can be used for elemental analyses and is capable of detecting carbon, nitrogen and oxygen. The EBSD (electron backscatter diffraction) system provides crystallographic information about regions of a specimen down to 20 nm (very best case). EBSD analyses determine crystal structure and orientation and are used to measure such things as crystallographic texture and determine the number and types of twins and grain boundaries.

When combined with data from the EDS system and by searching databases, such as the JCPDS database, it can be used for phase identification. The combination of advanced, high-resolution imaging, elemental analysis and crystallographic mapping makes this a very powerful research tool.

Offline processing of images, EDS spectra and EBSD data can be done using any of the computers in the Image Processing Laboratory which is located right around the corner.

Specifications

XL30-SFEG

Source Schottky-emitter, automatic gun configuration control, optimized for the whole voltage range, 0.10 to 30 kV accelerating potential (focus compensated) and 1pA to 25 nA beam current, stable to better than 0.2% per hour.

Resolution 1.5 nm at 10 kV or higher, 2.5 nm at 1 kV

Detectors SEI, BSE, in-lens, STEM

Images Images can be captured at resolutions up to 4k x 3k and saved as tiff files.

Stage 50 mm x 50 mm X-Y travel, 360° rotation, -15° to 75° tilt (-15° to 45° for large specimens), compucentric rotation, 1 to 60 mm working distance, all five axes are under computer control

Software Windows NT-based software with a multi-user shell.

The XL NT Docu software provides image database management features.

EDAX Phoenix EDS

Detector Ultra-thin windows Si-Li detector, 139 eV resolution, 5 mm working distance.

Software Windows NT-based, beam and stage control, auto-ZAF,

spectral mapping, x-ray mapping, image analysis