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Jeol JSM-5400

Seriennummer: 020299
Status: Archived Product?The unit is no longer available.
Verzending:
Beschrijving:
Jeol Scanning electron microscope JSM-5400. Edwards pump brand new. Thermo cooling recirculator with pump. Plate camera. Software for control and evaluation. License. Device was about 5 years until the end of 2005 as a dealer demo unit in use.
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Objektnummer B00020299
Seriennummer 020299
Object Naam Jeol JSM-5400
Status Archiv

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Labprocure

gebruikt

Labprocure GmbH is verantwoordelijk voor de inhoud van dit apparaataanbod. Labprocure aanvaardt aansprakelijkheid voor de hier geadverteerde aanbiedingen en voor de daarin opgenomen foto's en aanbiedingsteksten. Labprocure GmbH, Bruckstraße 58, 72393 Burladingen.

manufacturer :       Jeol

model:                   JSM 5400

annotation :           Dokumente engl.

 

 

DESCRIPTION, SPECIFICATIONS AND INSTALLATION REQUIREMENTS

The JSM-5400 Scanning Microscope can be used for observation of the entire Area of large sized specimens up to 5-inch in diameter by rotating them. The whole series of operation including vacuum evacuation, image observa-tion, focusing, and photographing have been automated. Moreover, provision of digitally processed still image allows very easy observation of images even in a bright room, making the JSM-5400 outstanding in operability.

Another feature ot the JSM-5400 is that an energy dispersive X-ray spectro-meter (EDS) and a wavelength dispereive X-ray speetrometer (WDS) can he attached to the apecimen chamber at the same time. The JSM-5400 la a-high performance multipurpose scanning electron microscope capable of extending its utility from morphological observation to elemental analysis.

 

Specifications

 

Performance

Reso/ution:                             4.0 nm (at 30 kV, WD = 8 mm),

                                              SEI (secondary electron image) mode

Magnifteation:                         x15 (WD = 48 um) to 200,000 (25 steps)

                                              Digital indication

Image modes:                        Secondary electron image (SEI)

                                              Backscattered electron image (BEI)

 

EOS (electron optical system)

Aceelerating voltage

(Aee.V.):                                 0.5 to 30 kV

                                              0.5 to 3 kV, 0.1 kV/step (26 steps)

                                              5 to 30 kV, 5 kV/step (6 steps)

                                              Hysteresis elimination function is linked for Acc.V. change

Electron gun filament:           Precentered W hairpin filament

                                              Cartridge type

                                              Hinge type gun open/close mechaniam

Filament monitor                    Built-in

Gun bias

AUTO mode:                          Automatic selection of the following 2 ranges:

                                              For high Acc.V. (2.1 to 30 kV)

                                              For low Acc.V. (0.3 to 2 kV)

MAN mode:                            Continuously variable manually

Alignment:                              Electromagnetic deflection type

Textfeld: 1-3 Lens system:                         3-stage

                                                Zoom condenser lens (CL): 2-stage

                                                Objective lens (OL): single-stage

OL aperture                            Variable type (3-step)

                                              Continuous heating type

                                              Fine position adjustalle

Focus wobbler:                      Built-in (usable in TV mode)

Focusing:                               Push-Button and knob type

                                              Manual, and automatic fdicusing device (AFD) built-in

                                              Automatic focus tracer (AFT) buflt-in.

Stigmator:                              8-pole electromagnetic type

Manual, and automatic astigmatism correction device (ASD) built-in

                                              Stigmator memory built-in

Specimen tilt correction:

Scanning coil:

0 to approx. 8° correctable

Dynamic Focusing Device(DFU) built-in

2-etage electromagnetic deflection type

Magnification control:             Automatic magnification corrector (MAC) built-in

Viewing field fine

shift :                                      Electromagnetic type

±10µm (at 30 kV, WD 20 mm) in all directions by JOYSTICK control

Probe current range :             10 -12 to 10 -6 A

 

Specimen Stage

Type                                       Eucentric goniometer

Specimen movements

  X direction shift:                   80 mm

  Y direction shift:                   40 mm

Tilt:                                         -10 to +90°

Rotation                                  360° (endless).

Working distance (WD):        8 to 48 mm continuously variable

                                  Digital indication an LCD by Z sensor

Specimen size:                      10 mm dia. x 5 mmh, 10 mm dia. x 10 mmh

                                              32 mm dia. x 5 mmh, 32 mm dia. x 10 mmh

                                              51 mm dia. x 5 mmh, 51 mm dia. x 10 mmh

                                              76 mm dia. x 5 mmh, 76 mm dia. x 10 mmh

                                              10 mm dia. x 10 mmh x 20 pcs.

Specimen exchang:              Draw-out type

                                              Slide type mechanism for loading/unloading of specimens

 

Detectors

SE/BE detector                      Consists of a collector, scintillator, light

                                              guide and a photomultiplier tube

 

Scanning System

Scanning modes:                  PIC (frame scan)

                                  TV (frame scan)

                                              LSP (line scan)

Scanning speed

For observation:                    0.27, 0.58, 2.88, 9.6 s/frame, TV scan

                                              (TV scan för SEI only)

For photographing:                50 Hz: >> on LCD ... 28.8 s/frame

                                                                on LCD ... 86.4 s/frame

                                              60 Hz: >> on LCD        24 sfframe

                                                                on LCD ... 72 s/frame

 

Display System

Magnification display:             x15 to 200,00 0

                                              (On LCD, and CRT in PIC1 mode only)

Observation CRT:                  2 One, 9-inch green CRT

Frame size:                            135 x 18G mm (TV mode)

Image quality control

Manual control:                       Rapid exposure system (display on CRT)

Auto control:                           Automatic contrast and brightness control

                                              (ACB) built-in

Observation condition display

Upper line on LCD :              Accelerating voltege

                                              Magnification

                                              Working distance

                                              Film number

                                              ACB linkage indication (A; ON/OFF)

                                              Photo speed     (or >>)

Lower line on LCD :              Evacuation sequence

                                              Warning/Fhoto monitor/Check data

Observation CRT:                  Digital diegay in the P/C1 mode only

                                              Accelerating voltage

                                              Magnification (O N/OFF)

                                              Micron marker with value

                                              Film number

 

Photo Recording System

Exposure meter:                    Rapid exposure system (displayed on CRT)

Shutter:                                  Automatic shutter built-in

Photo monitor                        Digital indication on LCD

Data recording

  Data display:                        ON/OFF selectable (on CRT and Photograph)

  Image on character

  Base:                                    ON/OFF selectable

  Data contents:                     Accelerating voltage

                                              Magnification

                                              Micron marker with value

                                              Film number (4-digit: manual set, and 2-digit: manual/auto set)

Data display modes               All data ON

                                              Magnification OFF

                                              Micron marker (with value) ON only

Camara for scanning

image (option):                       Manual and automatic shutters built-ln

MP-35030:                              For 6 x 7 roll film (photo/CRT magnification

                                              ratio : 0.5)

MP-35040:                              For instant pack film (0.75)

MP-35050:                              For 35 mm roll fi/m (0.25)

MP-35060:                              For instant 4 x 5 film (1.0)

MP-35070:                              For Polaroid auto film (0.85)

Recording CRT:                     One, 9-inch green CRT

 

Image Frame Store System

Memory capacity

Number of pixels:                   512 x 512 (512 x 480 for image)

Number of gray

scale steps:                           256

Number of frames                  One (Video graphic printer with 4-frame expand

                                              function is optionally available)

Still image display

CRT                                       One, 9-ineh green CRT (EIA, interlace scan type)

  Frame size:                          Approx. 128 x 166 mm

 

Vacuum System

Control:                                  Fully automatic sequence control •

                                              ( electromagnettc valves used)

                                              Evacuation sequence is indicated on LCD

Ultimate pressure:                 Approx. 7 x 10 -4 Pa (5 x 10 -6 Torr)

Eva euation time:                    Approx. 2.5 min

Vacuum pumps:                    One, 420 lit ./ s oil diffusion pump with water cooling baffle

                                              One, 100 lit ./ min oil rotary pump (RP)

Vacuum gauge                       One, Pirani gauge

                                              Preesure is indicated as a % on LCD.

Checkers and Safety Devices            •

Checkers

  Auto checkers:                     5 warniug indication on LCD

  Manual checkers:                 8-item indication on LCD (including 2 items

                                              for optional devices)

Safety devices:                      Protective devices are built-in for power and

                                              water failures, and pressure increase.

Others

Ports for X-ray

Measurement:                        Two, ene each for optional WDS (wavelength

                                  dispersive X-ray spectrometer) and EDS (energy

                                              dispersive X-ray spectrometer)

TV output terminals :             Two BNC-R connectors (75 ohms)

                                              (For TV mode ond still image)

TV output signal:                    TV mode; EIA or CCIR             •

                                              Still image; EIA

                                              Composite, positive polarity

                                              1 Vp-p, H =15.75 kHz ,   V = 60 Hz

Service outlet:                        One, 100 V AC, 2 A

 

Installation Requirements

Power Supply and Cooling Water

Power supply:                        Single-phase 100 V( ±10%) AC, 50/60 Hz, 2.5 kVA

                                              (voltage drop at 2.5 kVA should be within 3%).

Grounding terminal                One, 100 ohms or /ess.

Cooling water

  Faucet:                                 One, 10 to 12 mm O.D.

    Drain:                                   One, 25 mm I.D. or more

  Flow rate:                             2 lit ./ min.

  Pressure:                             0.05 to 0.2 lea .

  Temperature:                       20±5°C.

                                              (At SEM's water outlet should be 35°C or less.)

 

Environment

Temperature:                         20+5°C.

Humidity                                 60% or less.

Stray magnetic field :            0.3 µT or less.

Floor vibration:                       2 µm or less at 5 Hz (in X, Y and Z directions).

Floor space:                           2,500(W) x 2,300(D) x 1,800(H) mm or more.

 

Dimensions and Weight

Unit: mm & kg

 

Width

Depth

Height

Weight

Remarks

Column console

750

900

1,485

137

Standard composition

Operation console

650

900

1,220

183

ditto

Image frame store system

292

600

880

40

ditto

 

 

 

 

 

 

 

 

 

Installation Layout

Textfeld: 1-8 Unit: mm

Note 1: Fig. 1 shows a typical installation layout for the JSM-5400 Scanning Microscope with an optional XCS (X-ray counting system) of X-ray spectrometer.

Be sure to maintain service areas at the left and rear sides of the microscope even if only a small layout space is available.

Note 2: Install the microscope well apart from facilities producing vibrations or electromagnetic waves (such as roads, husy passages, railroads, elevators, air conditioners and their air outlets, transmission lines, etc.).

Note 3: This microscope does not require any blackout curtain.

Product groep: Electronenmicroscopen

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