Technical specifications
Measuring / control system | |
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Flow range (intermediate ranges available) | min. 0.16 ... 8 ml n / min Max. 0.5 ... 25 l n / min (based on N 2 ) |
Accuracy (including linearity) (based on the current calibration) | ± 0.5 % RD plus ± 0.1% FS |
Repeatability | < 0.2 % RD |
Turndown area | up to 1: 187.5 (1:50 in analog mode) |
Multi-fluid capability | Storage of max. 8 calibration curves; Optional multi-gas / multi-range functionality possible up to 10 bar |
Settling time (controller, typical) | standard: 1… 2 seconds option: down to 500 msec |
Control stability | <± 0.1 % FS (typical for 1 l n / min N 2 ) |
operating temperatur | -10 … +70 ° C |
Temperature sensitivity | zero: <0.05% FS / ° C; span: <0.05% Rd / ° C |
Pressure sensitivity | <0.1% Rd / bar typical N 2 ; 0.01% Rd / bar typical H 2 |
Max. Kv value | 6.6 x 10 -2 |
Leak tightness, to the outside | tested <2 x 10 -9 mbar l / s He |
Sensitivity to position | Max. Error 0.2% at 1 bar, typical for N 2 , u. 90 ° change |
Warm-up time | 30 minutes for best accuracy 2 min. For accuracy ± 2% FS |
mechanical parts | |
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Material (wetted parts) | 316L stainless steel or similar |
Pressure rating (PN) | 64 bar abs |
Process connections | Compression fittings or pipe fittings with sealing on the front (VCR / VCO) |
Seals | standard: Viton®; optional: EPDM, Kalrez® (FFKM), FDA and USP class VI approved sealing materials |
Weight | 0.6 kg |
Degree of protection (housing) | IP40 |
Electrical Properties | |||||
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Power supply | +15 … 24 Vdc | ||||
Current consumption max. |
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Analog output signal | 0… 5 (10) Vdc or 0 (4)… 20 mA (sourcing output) | ||||
Digital communication | standard: RS232; options: PROFIBUS DP, CANopen®, DeviceNet ™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP / IP, EtherNet / IP, FLOW-BUS |
Electrical connections | |
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Analog / RS232 | 9-pin D-connector (male); |
PROFIBUS DP | bus: 9-pin D-connector (female); power: 9-pin D-connector (male); |
CANopen® / DeviceNet ™ | 5-pin M12 connector (male); |
Modbus / FLOW-BUS | RJ45 modular jack |
Modbus TCP / EtherNet / IP | 2 x RJ45 modular jack (in / out); |
EtherCAT® / PROFINET | 2 x RJ45 modular jack (in / out) |